Evaluation of Multi-Level Thin Film Structures A Case Study Berger, Daniel ; Pennacchia, John R. ; Perfecto, Eric ; Longworth, Hai P. ; Omar, Ahmed ; Cullinan-Scholl, Mary ; Patel, Raj ; White, George Abstract Publication: Multichip Modules Pub Date: 1995 Bibcode: 1995SPIE.2575..216B