LIGA-based flexible microstructures for fiber-chip coupling Rogner, A. ; Ehrfeld, W. ; Munchmeyer, D. ; Bley, P. ; Burbaum, C. ; Mohr, J. Abstract Publication: Journal of Micromechanics and Microengineering Pub Date: September 1991 DOI: 10.1088/0960-1317/1/3/007 Bibcode: 1991JMiMi...1..167R