Integrated optical-micromechanical sensors on silicon
Abstract
Advantages and trends of the use of optical sensors for rocket and jet performance are discussed. Progress on developing a high-temperature optical waveguide technology is reviewed, and experimental data demonstrating low propagation loss are presented. The concept of a single polarization optical waveguide using this technology is introduced, and experimental data which confirm this concept are presented. It is noted that single polarization is important for realizing good performance such as high dynamic range in optical sensor devices using optical interference. Progress on channel waveguide design is discussed, with data for realistic structures presented. The design and operation of two integrated optical-micromechanical device configurations slated for future development are discussed.
- Publication:
-
Annual Health Monitoring Conference for Space Propulsion Systems
- Pub Date:
- 1990
- Bibcode:
- 1990spps.conf..412B
- Keywords:
-
- Engine Monitoring Instruments;
- Integrated Optics;
- Optical Waveguides;
- Optoelectronic Devices;
- Gas Flow;
- Micromechanics;
- Pressure Measurement;
- Rocket Engines;
- Silicon Nitrides;
- Stress Analysis;
- Instrumentation and Photography