Time-of-flight measurements of nonlinear effects in sputtering by dimer ions
Abstract
Time-of-flight distributions of sputtered Au atoms have been measured under 4 keV I+ and 8 keV I+2 impact. The results show that a developing thermal spike contributes to the sputtering yield. It is higher under I+2 bombardment but the measured temperature obtained from Maxwell-Boltzmann fits is lower, suggesting a lower effective surface binding energy U0 for I+2 bombardment. A correlation between spike temperatures and U0 is discussed.
- Publication:
-
Physical Review Letters
- Pub Date:
- September 1988
- DOI:
- 10.1103/PhysRevLett.61.1392
- Bibcode:
- 1988PhRvL..61.1392O
- Keywords:
-
- 79.20.Nc;
- 61.80.Jh;
- 61.80.Lj;
- Ion radiation effects;
- Atom and molecule irradiation effects