Autonomous control system for Czochralski growth of LEC GaAs
Abstract
The goals of this program include the establishment of autonomous liquid encapsulated Czochralski (LEC) crystal growth and its commercialization. This report provides a short description of the autonomous control system, a detailed description of the digital hardware developed for the control system and the multibus computer system and the computer-puller hardware of the growth system. Technical drawings for the signal processing box and the motor controller board are also given. During the first period (1 year) this system has grown 30 single GaAs crystals with a yield of better than 70 percent of single crystals.
- Publication:
-
Scientific Report
- Pub Date:
- December 1987
- Bibcode:
- 1987uaz..rept.....S
- Keywords:
-
- Artificial Intelligence;
- Automatic Control;
- Czochralski Method;
- Gallium Arsenides;
- Signal Processing;
- Engineering Drawings;
- Microcomputers;
- Solid-State Physics