磁気浮上型複合分子ポンプの磁場による影響; 磁気浮上型複合分子ポンプの磁場による影響; Influence of magnetic fields on a magnetic suspended compound-molecular pump.
Abstract
- Publication:
-
Journal of the Vacuum Society of Japan
- Pub Date:
- 1987
- DOI:
- 10.3131/jvsj.30.226
- Bibcode:
- 1987JVSJ...30..226H