Materials surface modification by plasma bombardment under simultaneous erosion and redeposition conditions
Abstract
The first in-depth investigation of surface modification of materials by continuous, high-flux argon plasma bombardment under simultaneous erosion and redeposition conditions have been carried out for copper and 304 stainless steel using the PISCES facility. The plasma bombardment conditions are: incident ion flux range from 10(17th) to 10(19th) ions sec/sq cm, total ion fluence is controlled between 10(19th) to 10(22nd) ions/sq cm, electron temperature range from 5 to 15 eV, and plasma density range from 10(11th) to 10(13th)/cu cm. The incident ion energy is 100 eV. The sample temperature is between 300 and 700K. Under redeposition dominated conditions, the material erosion rate due to the plasma bombardment is significantly smaller (by a factor up to 10) than that can be expected from the classical ion beam sputtering yield data. It is found that surface morphologies of redeposited materials strongly depend on the plasma bombardment condition. The effect of impurities on surface morphology is elucidated in detail. First-order modelings are implemented to interpret the reduced erosion rate and the surface evolution. Also, fusion related surface properties of redeposited materials such as hydrogen reemission and plasma driven permeation have been characterized.
- Publication:
-
Presented at the Workshop on Surface Modification By Plasma-Surface Interactions
- Pub Date:
- July 1986
- Bibcode:
- 1986smps.work.....H
- Keywords:
-
- Deposition;
- Erosion;
- Irradiation;
- Plasma Interactions;
- Sputtering;
- Surface Properties;
- Copper;
- Morphology;
- Plasma Density;
- Stainless Steels;
- Surface Reactions;
- Plasma Physics