新型分子ポンプの開発 I; 新型分子ポンプの開発 I Iguchi, Masashi ; Nagakubo, Masao ; Hashimoto, Shoichi ; Kaneto, Shigeru ; Oikawa, Hisashi Abstract Publication: Journal of the Vacuum Society of Japan Pub Date: 1984 DOI: 10.3131/jvsj.27.422 Bibcode: 1984JVSJ...27..422I