Low Energy X-Ray and Electron Damage to IGFET Gate Insulators Reisman, A. ; Merz, C. J. ; Maldonado, J. R. ; Molzen, W. W., Jr. Abstract Publication: Journal of the Electrochemical Society Pub Date: June 1984 DOI: 10.1149/1.2115859 Bibcode: 1984JElS..131.1404R