Determination of electron mean free path in silicon in the 50-1000 eV energy range
Abstract
- Publication:
-
Akademiia Nauk SSSR Izvestiia Seriia Fizicheskaia
- Pub Date:
- September 1979
- Bibcode:
- 1979IzSSR..43.1919Z
- Keywords:
-
- Electron Energy;
- Electron Trajectories;
- Mean Free Path;
- Silicon Junctions;
- Electron Distribution;
- Error Analysis;
- Film Thickness;
- Semiconductors (Materials);
- Sprayed Coatings;
- Substrates;
- Temperature Measurement;
- Thin Films;
- Solid-State Physics