The effect of laser irradiation on the structural and electrical properties of the surface of silicon
Abstract
- Publication:
-
Ukrainskii Fizicheskii Zhurnal
- Pub Date:
- May 1976
- Bibcode:
- 1976UkFiZ..21..750Z
- Keywords:
-
- Electrical Properties;
- Laser Damage;
- Radiation Effects;
- Silicon;
- Surface Properties;
- Atomic Structure;
- Crystal Structure;
- Electron Diffraction;
- Solid-State Physics