Investigation of the resolution of metal-nitride-oxide-semiconductor structures in recording and reading of optical information
Abstract
- Publication:
-
Kvantovaia Elektronika Moscow
- Pub Date:
- October 1974
- Bibcode:
- 1974KvanE...1.2291K
- Keywords:
-
- Electro-Optics;
- Metal-Nitride-Oxide-Silicon;
- Optical Memory (Data Storage);
- Resolution;
- Semiconductor Devices;
- Helium-Neon Lasers;
- Light Beams;
- Microelectronics;
- N-Type Semiconductors;
- Thin Films;
- Solid-State Physics