Rayleigh scattering, mode coupling, and optical loss in silicon microdisks
Abstract
High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×105, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5μm are studied, with measured quality factors as high as 4.7×105 for an optical mode volume of 5.3(λ/n)3.
- Publication:
-
Applied Physics Letters
- Pub Date:
- October 2004
- DOI:
- 10.1063/1.1811378
- arXiv:
- arXiv:physics/0406101
- Bibcode:
- 2004ApPhL..85.3693B
- Keywords:
-
- 42.55.Sa;
- 42.55.Px;
- 68.35.Bs;
- Microcavity and microdisk lasers;
- Semiconductor lasers;
- laser diodes;
- Structure of clean surfaces;
- Physics - Optics
- E-Print:
- 4 pages, 2 figures