Imaging of microwave permittivity, tunability, and damage recovery in (Ba, Sr)TiO3 thin films
Abstract
We describe the use of a near-field scanning microwave microscope to quantitatively image the dielectric permittivity and tunability of thin-film dielectric samples on a length scale of 1 μm. We demonstrate this technique with permittivity images and local hysteresis loops of a 370-nm-thick Ba0.6Sr0.4TiO3 thin film at 7.2 GHz. We also observe the role of annealing in the recovery of dielectric tunability in a damaged region of the thin film. We can measure changes in relative permittivity ɛr as small as 2 at ɛr=500, and changes in dielectric tunability dɛr/dV as small as 0.03 V-1.
- Publication:
-
Applied Physics Letters
- Pub Date:
- November 1999
- DOI:
- 10.1063/1.125270
- arXiv:
- arXiv:cond-mat/9910014
- Bibcode:
- 1999ApPhL..75.3180S
- Keywords:
-
- 77.55.+f;
- 77.84.Dy;
- 77.22.Ch;
- 77.80.Dj;
- 81.40.Gh;
- 81.40.Tv;
- Dielectric thin films;
- Niobates titanates tantalates PZT ceramics etc.;
- Permittivity;
- Domain structure;
- hysteresis;
- Other heat and thermomechanical treatments;
- Optical and dielectric properties;
- Condensed Matter - Materials Science
- E-Print:
- 5 pages, 2 figures. To be published in Applied Physics Letters, Nov. 15, 1999