Highly Site-Specific H2 Adsorption on Vicinal Si\(001\) Surfaces

Experimental and theoretical results for the dissociative adsorption of H₂ on vicinal Si(001) surfaces are presented. Using optical second-harmonic generation, sticking probabilities at the step sites are found to exceed those on the terraces by up to 6 orders of magnitude. Density functional theory calculations indicate the presence of direct adsorption pathways for monohydride formation but with a dramatically lowered barrier for step adsorption due to an efficient rehybridization of dangling orbitals.