Surface resistance imaging with a scanning near-field microwave microscope
Abstract
We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant frequency, allowing measurements with a sensitivity to frequency shifts as small as two parts in 106 for a 30 ms sampling time. The frequency shifts can be converted to sheet resistance based on a simple model of the system.
- Publication:
-
Applied Physics Letters
- Pub Date:
- September 1997
- DOI:
- 10.1063/1.120020
- arXiv:
- arXiv:cond-mat/9712142
- Bibcode:
- 1997ApPhL..71.1736S
- Keywords:
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- Condensed Matter - Materials Science
- E-Print:
- 6 pages, 3 figures