A Plasma-Based Approach for High-Power Tunable Microwave Varactors
Abstract
This work presents a tunable varactor with tunability in the range of 100s of MHz and a capacitance delta of about 36 pF by employing a perpendicular magnetic field to a capacitively-coupled (CCP) RF plasma cell. A comprehensive high-frequency circuit model for the fabricated varactor is proposed and verified experimentally for a plasma electron number density of $2.95\times10^{17}m^{-3}$ which has a tunability of 146 MHz with a magnetic flux density ranging from 0 to 246 milliTesla. Under a pressure of 64 milliTorrs, the Argon ccp was found to have a variable capacitance ranging from 4 pF to 41.72 pF.
- Publication:
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arXiv e-prints
- Pub Date:
- April 2024
- DOI:
- 10.48550/arXiv.2404.18068
- arXiv:
- arXiv:2404.18068
- Bibcode:
- 2024arXiv240418068M
- Keywords:
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- Physics - Plasma Physics
- E-Print:
- 3 pages,5 figures