Atomistic modeling of thermal effects in focused electron beam-induced deposition of Me2 Au(tfac)
Abstract
The role of thermal effects in the focused electron beam-induced deposition (FEBID) of Me
- Publication:
-
European Physical Journal D
- Pub Date:
- January 2023
- DOI:
- 10.1140/epjd/s10053-023-00598-5
- arXiv:
- arXiv:2208.12134
- Bibcode:
- 2023EPJD...77...15P
- Keywords:
-
- Condensed Matter - Materials Science;
- Condensed Matter - Mesoscale and Nanoscale Physics;
- Physics - Chemical Physics
- E-Print:
- 14 pages, 8 figures