High-Sensitivity Air-Coupled Megahertz-Frequency Ultrasound Detection Using On-Chip Microcavities
Abstract
Owing to their dual-resonance enhanced sensitivity, cavity optomechanical systems provide an ideal platform for ultrasound sensing. In this work, we realize high-sensitivity air-coupled ultrasound sensing from kilohertz to megahertz frequency range based on whispering gallery mode microcavities. Using a 57 -μ m -diameter microtoroid with high optical Q factor (approximately 107) and mechanical Q factor (approximately 700 ), we achieve sensitivities of 46 μ Pa Hz−1 /2-10 mPa Hz−1 /2 in a frequency range of 0.25-3.2 MHz. Thermal-noise-limited sensitivity is realized around a mechanical resonance at 2.56 MHz, in a frequency range of 0.6 MHz. We also observe the second- and third-order mechanical sidebands, and quantitatively study the intensities of each mechanical sideband as a function of the mechanical displacement. Measuring the combination of signal-to-noise ratios at all sidebands has the potential to extend the dynamic range of ultrasound sensing.
- Publication:
-
Physical Review Applied
- Pub Date:
- September 2022
- DOI:
- 10.1103/PhysRevApplied.18.034035
- arXiv:
- arXiv:2203.04805
- Bibcode:
- 2022PhRvP..18c4035Y
- Keywords:
-
- Physics - Optics;
- Physics - Applied Physics