Nitrogen plasma passivated niobium resonators for superconducting quantum circuits
Abstract
Microwave loss in niobium metallic structures used for superconducting quantum circuits is limited by a native surface oxide layer formed over a timescale of minutes when exposed to an ambient environment. In this work, we show that nitrogen plasma treatment forms a niobium nitride layer at the metal-air interface, which prevents such oxidation. X-ray photoelectron spectroscopy confirms the doping of nitrogen more than 5 nm into the surface and a suppressed oxygen presence. This passivation remains stable after aging for 15 days in an ambient environment. Cryogenic microwave characterization shows an average filling-factor-adjusted two-level-system loss tangent F δ TLS of ( 2.9 ± 0.5 ) · 10 - 7 for resonators with a 3 μm center strip and ( 1.0 ± 0.3 ) · 10 - 7 for a 20 μm center strip, exceeding the performance of unpassivated samples by a factor of four.
- Publication:
-
Applied Physics Letters
- Pub Date:
- March 2022
- DOI:
- 10.1063/5.0082755
- arXiv:
- arXiv:2201.01776
- Bibcode:
- 2022ApPhL.120j2601Z
- Keywords:
-
- Physics - Applied Physics;
- Condensed Matter - Superconductivity;
- Quantum Physics
- E-Print:
- 7 pages, 5 figures