Orthogonal transform for estimating the number of targets in a radar resolution cell
Abstract
Scanning superconducting quantum interference device (sSQUID) microscopy is currently one of the most effective methods for direct and sensitive magnetic flux imaging on the mesoscopic scale. A SQUID-on-chip (SOC) design allows integration of field coils for susceptometry in a gradiometer setup which is very desirable for measuring magnetic responses of quantum matter. However, the spatial resolution of such a design has largely been limited to micrometers due to the difficulty in approaching the sample. Here, we used electron beam lithography technology in the fabrication of the 3D nano-bridge-based SQUID devices to prepare pick-up coils with diameters down to 150 nm. Furthermore, we integrated the deep silicon etching process in order to minimize the distance between the pick-up coil and the wafer edge. Combined with a tuning-fork-based scanning head, the sharpness of the etched chip edge enables a precision of 5 nm in height control. By scanning measurements on niobium chessboard samples using these improved SQUID devices, we demonstrate sub-micron spatial resolutions in both magnetometry and susceptometry, significantly better than our previous generations of nano-SQUIDs. Such improvement in spatial resolution of SOC is a valuable progress for magnetic imaging of quantum materials and devices in various modes.
- Publication:
-
Superconductor Science Technology
- Pub Date:
- November 2021
- DOI:
- 10.1088/1361-6668/ac2794
- arXiv:
- arXiv:2106.09337
- Bibcode:
- 2021SuScT..34k5011P
- Keywords:
-
- scanning SQUID;
- quantum materials;
- spatial resolution;
- susceptometry;
- Condensed Matter - Mesoscale and Nanoscale Physics
- E-Print:
- Supercond. Sci. Technol. 34, 115011 (2021)