Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration
Abstract
Thermally activated selective topography equilibration (TASTE) enables the creation of 3D structures in resist using grayscale electron-beam lithography followed by a thermal treatment to induce a selective polymer reflow. A blazed grating topography can be created by reflowing repeating staircase patterns in resist into wedge-like structures. Motivated by astronomical applications, such patterns with periodicities 840 nm and 400 nm have been fabricated in 130 nm-thick PMMA using TASTE to provide a base for X-ray reflection gratings. A path forward to integrate this alternative blazing technique into grating fabrication recipes is discussed.
- Publication:
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arXiv e-prints
- Pub Date:
- February 2021
- DOI:
- 10.48550/arXiv.2102.12359
- arXiv:
- arXiv:2102.12359
- Bibcode:
- 2021arXiv210212359M
- Keywords:
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- Astrophysics - Instrumentation and Methods for Astrophysics;
- Condensed Matter - Materials Science
- E-Print:
- 21 pages, 8 figures, from a special edition of JVST B for the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN)