Ultra-thin corrugated metamaterial film as large-area transmission dynode
Abstract
Large-area transmission dynodes were fabricated by depositing an ultra-thin continuous film on a silicon wafer with a 3-dimensional pattern. After removing the silicon, a corrugated membrane with enhanced mechanical properties was formed. Mechanical metamaterials, such as this corrugated membrane, are engineered to improve its strength and robustness, which allows it to span a larger surface in comparison to flat membranes while the film thickness remains constant. The ultra-thin film consists of three layers (Al2O3/TiN/Al2O3) and is deposited by atomic layer deposition (ALD). The encapsulated TiN layer provides in-plane conductivity, which is needed to sustain secondary electron emission. Two types of corrugated membranes were fabricated: a hexagonal honeycomb and an octagonal pattern. The latter was designed to match the square pitch of a CMOS pixel chip. The transmission secondary electron yield was determined with a collector-based method using a scanning electron microscope. The highest transmission electron yield was measured on a membrane with an octagonal pattern. A yield of 2.15 was achieved for 3.15 keV incident electrons for an Al2O3/TiN/Al2O3 tri-layer film with layer thicknesses of 10/5/15 nm. The variation in yield across the surface of the corrugated membrane was determined by constructing a yield map. The active surface for transmission secondary electron emission is near 100%, i.e. a primary electron generates transmission secondary electrons regardless of the point of impact on the corrugated membrane.
- Publication:
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Journal of Instrumentation
- Pub Date:
- September 2022
- DOI:
- 10.1088/1748-0221/17/09/P09027
- arXiv:
- arXiv:2008.09054
- Bibcode:
- 2022JInst..17P9027C
- Keywords:
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- Secondary electron emitters and dynodes and their production;
- Avalanche-induced secondary effects;
- Electron multipliers (vacuum);
- Physics - Instrumentation and Detectors;
- High Energy Physics - Experiment
- E-Print:
- doi:10.1088/1748-0221/17/09/P09027