Intense boundary emission destroys normal radio-frequency plasma sheath
Abstract
The plasma sheath is the non-neutral space charge region that isolates bulk plasma from a boundary. Radio-frequency (RF) sheaths are formed when applying RF voltage to electrodes. Generally, applied bias is mainly consumed by a RF sheath, which shields an external field. Here we report evidence that an intense boundary emission destroys a normal RF sheath and establishes a type of RF plasma where external bias is consumed by bulk plasma instead of a sheath. Ions are naturally confined while plasma electrons are unobstructed, generating a strong RF current in the entire plasma, combined with a unique particle and energy balance. The proposed model offers the possibility for ion erosion mitigation of a plasma-facing component. It also inspires techniques for reaction rate control in plasma processing and wave mode conversion.
- Publication:
-
Physical Review E
- Pub Date:
- March 2020
- DOI:
- 10.1103/PhysRevE.101.033203
- arXiv:
- arXiv:1909.00127
- Bibcode:
- 2020PhRvE.101c3203S
- Keywords:
-
- Physics - Plasma Physics
- E-Print:
- Phys. Rev. E 101, 033203 (2020)