Linearized and compensated interferometric system for high-velocity traceable length calibration on a metre scale
Abstract
We report on a traceable calibration system for a 3500mm-long console that carries a measurement system for inspecting the diameter of a circular reactor chassis. The system uses two single-pass laser interferometers with homodyne fringe detection for measurement in two degrees of freedom. The hybrid FPGA-microcontroller control module carries out the fringe detection together with the application-specific scale linearization approach and the compensation of environmental influences such as thermal elongation and the refractive index of air fluctuations. We demonstrated the system feasibility with an accuracy of a few microns and translation velocity higher than 0:1 metre per second.
- Publication:
-
21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics
- Pub Date:
- December 2018
- DOI:
- 10.1117/12.2519461
- arXiv:
- arXiv:1905.00778
- Bibcode:
- 2018SPIE10976E..08R
- Keywords:
-
- Physics - Instrumentation and Detectors;
- Physics - Applied Physics
- E-Print:
- CPS 2018, Lednice, CZ, September 2018 7 pages, 8 figures