High-precision contactless optical 3D-metrology of silicon sensors
Abstract
We describe a setup and procedures for contactless optical 3D-metrology of silicon micro-strip sensors. Space points are obtained by video microscopy and a high precision XY-table. The XY-dimensions are obtained from the movement of the table and pattern recognition, while the Z-dimension results from a Fast Fourier Transformation analyses of microscopic images taken at various distances of the optical system from the object under investigation, i.e. focus-based optical metrology. The setup is employed to measure the position of silicon sensors mounted onto a carbon fibre structure with a precision of a few microns.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- August 2019
- DOI:
- 10.1016/j.nima.2019.04.039
- arXiv:
- arXiv:1812.00917
- Bibcode:
- 2019NIMPA.935..167L
- Keywords:
-
- Silicon sensors;
- Optical metrology;
- Video microscope;
- Physics - Instrumentation and Detectors
- E-Print:
- doi:10.1016/j.nima.2019.04.039