Flow sensor based on the snap-through detection of a curved micromechanical beam
Abstract
We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the beam curvature and consequently the critical snap-through voltage ($V_{ST}$). Using single crystal silicon beams, we demonstrate the snap-through voltage to flow velocity sensitivity of $dV_{\text{ST}}/du \approx0.13$ V s m$^{-1}$ with a power consumption of $\approx360\; \mu$W. Our experimental results were in accord with the reduced order, coupled, thermo-electro-mechanical model prediction. We anticipate that electrostatically induced snap-through in curved, micromechanical beams will open new directions for the design and implementation of downscaled flow sensors for autonomous applications and environmental sensors.
- Publication:
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arXiv e-prints
- Pub Date:
- June 2018
- DOI:
- 10.48550/arXiv.1806.05396
- arXiv:
- arXiv:1806.05396
- Bibcode:
- 2018arXiv180605396K
- Keywords:
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- Physics - Applied Physics;
- 74G60
- E-Print:
- Submitted to JMEMS letters, 3 pages, 2 figures