Dynamic metasurface lens based on MEMS technology
Abstract
In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.
- Publication:
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APL Photonics
- Pub Date:
- February 2018
- DOI:
- 10.1063/1.5018865
- arXiv:
- arXiv:1712.03616
- Bibcode:
- 2018APLP....3b1302R
- Keywords:
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- Physics - Applied Physics
- E-Print:
- APL Photonics 3, 021302 (2018)