Nanoladder Cantilevers Made from Diamond and Silicon
Abstract
We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size $\sim$ 100 nm. Compared to a rectangular beam of the same dimensions, the mass and spring constant of a nanoladder are each reduced by roughly two orders of magnitude. We demonstrate a low force noise of $158 (+62)(-42)\,$zN and $190 (+42)(-33)\,$zN in a one-Hz bandwidth for devices made from silicon and diamond, respectively, measured at temperatures between 100--150 mK. As opposed to bottom-up mechanical resonators like nanowires or nanotubes, nanoladder cantilevers can be batch-fabricated using standard lithography, which is a critical factor for applications in scanning force microscopy.
- Publication:
-
Nano Letters
- Pub Date:
- March 2018
- DOI:
- 10.1021/acs.nanolett.7b05035
- arXiv:
- arXiv:1711.11358
- Bibcode:
- 2018NanoL..18.1814H
- Keywords:
-
- Condensed Matter - Mesoscale and Nanoscale Physics
- E-Print:
- doi:10.1021/acs.nanolett.7b05035