Using the Medipix3 detector for direct electron imaging in the range 60 keV to 200 keV in electron microscopy
Abstract
Hybrid pixel sensor technology such as the Medipix3 represents a unique tool for electron imaging. We have investigated its performance as a direct imaging detector using a Transmission Electron Microscope (TEM) which incorporated a Medipix3 detector with a 300 μm thick silicon layer compromising of 256×256 pixels at 55 μm pixel pitch. We present results taken with the Medipix3 in Single Pixel Mode (SPM) with electron beam energies in the range, 60-200 keV . Measurements of the Modulation Transfer Function (MTF) and the Detective Quantum Efficiency (DQE) were investigated. At a given beam energy, the MTF data was acquired by deploying the established knife edge technique. Similarly, the experimental data required to determine DQE was obtained by acquiring a stack of images of a focused beam and of free space (flatfield) to determine the Noise Power Spectrum (NPS).
- Publication:
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Journal of Instrumentation
- Pub Date:
- November 2017
- DOI:
- 10.1088/1748-0221/12/11/C11015
- arXiv:
- arXiv:1710.02227
- Bibcode:
- 2017JInst..12C1015M
- Keywords:
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- Physics - Instrumentation and Detectors
- E-Print:
- doi:10.1088/1748-0221/12/11/C11015