Theoretical analysis of electrostatic energy harvester configured as Bennet's doubler based on Q-V cycles

This paper presents theoretical analysis of a MEMS electrostatic energy harvester configured as the Bennet's doubler. Steady-state operation of the doubler circuit can be approximated by a right-angled trapezoid Q-V cycle. A similarity between voltage doubler and resistive-based charge-pump circuit is highlighted. By taking electromechanical coupling into account, the analytical solution of the saturation voltage is the first time derived, providing a greater comprehension of the system performance and multi-parameter effects. The theoretical approach is verified by results of circuit simulation for two cases of mathematically idealized diode and of Schottky diode. Development of the doubler/multiplier circuits that can further increase the saturation voltage is investigated.