Fabrication of Ultrathin Single-Crystal Diamond Membranes
Abstract
We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a significant enabling technology for nanomechanical and photonic structures incorporating colour-centres. The process uses a novel double implant process, annealing and chemical etching to produce membranes of diamond from single-crystal starting material, the thinnest layers achieved to date are 210 nm thick.
- Publication:
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arXiv e-prints
- Pub Date:
- August 2016
- DOI:
- 10.48550/arXiv.1608.08914
- arXiv:
- arXiv:1608.08914
- Bibcode:
- 2016arXiv160808914F
- Keywords:
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- Condensed Matter - Materials Science
- E-Print:
- 21 pages, 4 figures