Design of tunable GHz-frequency optomechanical crystal resonators
Abstract
We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V^2 with an on-chip capacitor that was optimized to exert forces up to 1 $\mu$N at 10 V operation voltage. Optical resonance frequencies around 190 THz with Q factors up to $2.2 \times 10^6$ place the structure in the well-resolved sideband regime with vacuum optomechanical coupling rates up to $g_0/2\pi = 353$ kHz. Tuning can be used, for instance, to overcome variation in the device-to-device acoustic resonance frequency due to fabrication errors, paving the way for optomechanical circuits consisting of arrays of optomechanical cavities.
- Publication:
-
Optics Express
- Pub Date:
- May 2016
- DOI:
- 10.1364/OE.24.011407
- arXiv:
- arXiv:1603.05721
- Bibcode:
- 2016OExpr..2411407P
- Keywords:
-
- Physics - Optics
- E-Print:
- 13 pages, 5 figures