Advanced scanning probe lithography
Abstract
This article reviews the fundamentals and applications of scanning probe lithography, focusing on the methods that offer genuinely lithographic capabilities such as those based on thermal effects, chemical reactions and voltage-induced processes.
- Publication:
-
Nature Nanotechnology
- Pub Date:
- August 2014
- DOI:
- arXiv:
- arXiv:1505.01260
- Bibcode:
- 2014NatNa...9..577G
- Keywords:
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- Condensed Matter - Materials Science
- E-Print:
- 27 pages, 5 figures. http://www.nature.com/nnano/journal/v9/n8/full/nnano.2014.157.html