Analysis of magnetic electron lens with secant hyperbolic field distribution

Electron-optical imaging instruments like Scanning Electron Microscope (SEM) and Transmission Electron Microscope (TEM) use specially designed solenoid electromagnets for focusing of the electron beam. Indicators of imaging performance of these instruments, like spatial resolution, have a strong correlation with the focal characteristics of the magnetic lenses, which in turn have been shown to be sensitive to the details of the spatial distribution of the axial magnetic field. Owing to the complexity of designing practical lenses, empirical mathematical expressions are important to obtain the desired focal properties. Thus the degree of accuracy of such models in representing the actual field distribution determines accuracy of the calculations and ultimately the performance of the lens. Historically, the mathematical models proposed by Glaser [1] and Ramberg [2] have been extensively used. In this paper the authors discuss another model with a secant-hyperbolic type magnetic field distribution function, and present a comparison between models, utilizing results from finite element-based field simulations as the reference for evaluating performance.