Three-axis Hall transducer based on semiconductor microtubes
Abstract
A three-axis Hall transducer based on GaAs/AlGaAs/InGaAs microtubes has been fabricated. The possibility of simultaneous measurement of all the three magnetic field components with such a transducer was demonstrated. It was also shown possible to pack the free-standing parts of the transducer with polydimethylsiloxane for protection of those parts from mechanical actions.
- Publication:
-
Applied Physics Letters
- Pub Date:
- October 2013
- DOI:
- 10.1063/1.4826680
- arXiv:
- arXiv:1401.7103
- Bibcode:
- 2013ApPhL.103q3513V
- Keywords:
-
- aluminium compounds;
- gallium arsenide;
- Hall effect transducers;
- III-V semiconductors;
- indium compounds;
- magnetic field measurement;
- magnetic sensors;
- polymers;
- 07.55.-w;
- 07.07.Mp;
- Magnetic instruments and components;
- Transducers;
- Condensed Matter - Mesoscale and Nanoscale Physics;
- Physics - Instrumentation and Detectors
- E-Print:
- 9 pages, 5 figures, 21 references