Casimir forces on a silicon micromechanical chip
Abstract
Quantum fluctuations give rise to van der Waals and Casimir forces that dominate the interaction between electrically neutral objects at sub-micron separations. Under the trend of miniaturization, such quantum electrodynamical effects are expected to play an important role in micro- and nano-mechanical devices. Nevertheless, utilization of Casimir forces on the chip level remains a major challenge because all experiments so far require an external object to be manually positioned close to the mechanical element. Here by integrating a force-sensing micromechanical beam and an electrostatic actuator on a single chip, we demonstrate the Casimir effect between two micromachined silicon components on the same substrate. A high degree of parallelism between the two near-planar interacting surfaces can be achieved because they are defined in a single lithographic step. Apart from providing a compact platform for Casimir force measurements, this scheme also opens the possibility of tailoring the Casimir force using lithographically defined components of non-conventional shapes.
- Publication:
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Nature Communications
- Pub Date:
- May 2013
- DOI:
- 10.1038/ncomms2842
- arXiv:
- arXiv:1207.6163
- Bibcode:
- 2013NatCo...4.1845Z
- Keywords:
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- Condensed Matter - Mesoscale and Nanoscale Physics;
- Quantum Physics
- E-Print:
- Nature Communications 4, 1845 (2013)