Strongly coupled modes in a weakly driven micromechanical resonator
Abstract
We demonstrate a strong coupling between the flexural vibration modes of a clamped-clamped micromechanical resonator vibrating at low amplitudes. This coupling enables the direct measurement of the frequency response via amplitude- and phase modulation schemes using the fundamental mode as a mechanical detector. In the linear regime, a frequency shift of 0.8 Hz is observed for a mode with a line width of 5.8 Hz in vacuum. The measured response is well-described by the analytical model based on the Euler-Bernoulli beam including tension. Calculations predict an upper limit for the room-temperature Q-factor of 4.5×105 for our top-down fabricated micromechanical beam resonators.
- Publication:
-
Applied Physics Letters
- Pub Date:
- December 2012
- DOI:
- 10.1063/1.4769182
- arXiv:
- arXiv:1207.1594
- Bibcode:
- 2012ApPhL.101x3111V
- Keywords:
-
- amplitude modulation;
- beams (structures);
- frequency response;
- micromechanical resonators;
- phase modulation;
- vibrations;
- 85.85.+j;
- Micro- and nano-electromechanical systems and devices;
- Condensed Matter - Mesoscale and Nanoscale Physics
- E-Print:
- 9 pages, 2 figures