Design and Fabrication of Micromachined Resonators
Abstract
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations. A few other bulk mode modified resonator geometries are also being explored. The resonator structures have been designed and simulated in CoventorWare finite-element platform and fabricated by the PolyMUMPs surface micromachining process.
- Publication:
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arXiv e-prints
- Pub Date:
- February 2012
- DOI:
- 10.48550/arXiv.1202.3048
- arXiv:
- arXiv:1202.3048
- Bibcode:
- 2012arXiv1202.3048C
- Keywords:
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- Computer Science - Other Computer Science
- E-Print:
- 7 pages, 12 figures