Fabrication of submicron La2-xSrxCuO4 intrinsic Josephson junction stacks
Abstract
Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La2-xSrxCuO4 (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multibranches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.
- Publication:
-
Journal of Applied Physics
- Pub Date:
- February 2011
- DOI:
- arXiv:
- arXiv:1108.3469
- Bibcode:
- 2011JAP...109c3912K
- Keywords:
-
- focused ion beam technology;
- high-temperature superconductors;
- Josephson effect;
- lanthanum compounds;
- sputter etching;
- strontium compounds;
- zone melting;
- 74.50.+r;
- 74.72.-h;
- 81.10.Fq;
- 81.65.Cf;
- 52.77.Bn;
- Tunneling phenomena;
- point contacts weak links Josephson effects;
- Cuprate superconductors;
- Growth from melts;
- zone melting and refining;
- Surface cleaning etching patterning;
- Etching and cleaning;
- Condensed Matter - Superconductivity;
- Quantum Physics
- E-Print:
- 5 pages, 6 figures