Mechanically compliant grating reflectors for optomechanics
Abstract
We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 105 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical properties of the membrane.
- Publication:
-
Applied Physics Letters
- Pub Date:
- February 2012
- DOI:
- 10.1063/1.3684248
- arXiv:
- arXiv:1107.3170
- Bibcode:
- 2012ApPhL.100f1124K
- Keywords:
-
- dielectric materials;
- diffraction gratings;
- Fabry-Perot resonators;
- membranes;
- optical elements;
- Q-factor;
- silicon compounds;
- 42.79.Bh;
- 42.79.Dj;
- Lenses prisms and mirrors;
- Gratings;
- Physics - Optics;
- Condensed Matter - Mesoscale and Nanoscale Physics
- E-Print:
- doi:10.1063/1.3684248