Nanofabricated solid immersion lenses registered to single emitters in diamond
Abstract
We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.
- Publication:
-
Applied Physics Letters
- Pub Date:
- March 2011
- DOI:
- 10.1063/1.3573870
- arXiv:
- arXiv:1012.1135
- Bibcode:
- 2011ApPhL..98m3107M
- Keywords:
-
- colour centres;
- diamond;
- fluorescence;
- focused ion beam technology;
- lenses;
- sputter etching;
- vacancies (crystal);
- 81.05.ug;
- 81.65.Cf;
- 78.55.Hx;
- 61.72.jn;
- 61.72.jd;
- 52.77.Bn;
- Surface cleaning etching patterning;
- Other solid inorganic materials;
- Color centers;
- Vacancies;
- Etching and cleaning;
- Quantum Physics
- E-Print:
- Appl. Phys. Lett. 98, 133107 (2011)