Titanium nitride films for ultrasensitive microresonator detectors
Abstract
Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors for the following reasons: (a) the critical temperature varies with composition (0<Tc<5 K); (b) the normal-state resistivity is large, ρn∼100 μΩ cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and (c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Qi>107) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10-200 μs. TiN microresonators should therefore reach sensitivities well below 10-19 W Hz-1/2.
- Publication:
-
Applied Physics Letters
- Pub Date:
- September 2010
- DOI:
- 10.1063/1.3480420
- arXiv:
- arXiv:1003.5584
- Bibcode:
- 2010ApPhL..97j2509L
- Keywords:
-
- electrical resistivity;
- quasiparticles;
- sputter deposition;
- superconducting microwave devices;
- superconducting resonators;
- superconducting thin films;
- thin film sensors;
- titanium compounds;
- 85.25.-j;
- 07.07.Df;
- Superconducting devices;
- Sensors;
- remote sensing;
- Condensed Matter - Superconductivity;
- Physics - Instrumentation and Detectors
- E-Print:
- to be published in APL