Damping of Nanomechanical Resonators
Abstract
We study the transverse oscillatory modes of nanomechanical silicon nitride strings under high tensile stress as a function of geometry and mode index m≤9. Reproducing all observed resonance frequencies with classical elastic theory we extract the relevant elastic constants. Based on the oscillatory local strain we successfully predict the observed mode-dependent damping with a single frequency-independent fit parameter. Our model clarifies the role of tensile stress on damping and hints at the underlying microscopic mechanisms.
- Publication:
-
Physical Review Letters
- Pub Date:
- July 2010
- DOI:
- 10.1103/PhysRevLett.105.027205
- arXiv:
- arXiv:1003.1868
- Bibcode:
- 2010PhRvL.105b7205U
- Keywords:
-
- 85.85.+j;
- 46.40.Ff;
- 62.40.+i;
- Micro- and nano-electromechanical systems and devices;
- Resonance damping and dynamic stability;
- Anelasticity internal friction stress relaxation and mechanical resonances;
- Condensed Matter - Mesoscale and Nanoscale Physics
- E-Print:
- doi:10.1103/PhysRevLett.105.027205