Patterning of ultrathin YBCO nanowires using a new focused-ion-beam process
Abstract
Manufacturing superconducting circuits out of ultrathin films is a challenging task when it comes to patterning complex compounds, which are likely to be deteriorated by the patterning process. With the purpose of developing high-Tc superconducting photon detectors, we designed a novel route to pattern ultrathin YBCO films down to the nanometric scale. We believe that our method, based on a specific use of a focused-ion beam, consists of locally implanting Ga3 + ions and/or defects instead of etching the film. This protocol could be of interest for engineering high-Tc superconducting devices (SQUIDS, SIS/SIN junctions and Josephson junctions), as well as to treat other sensitive compounds.
- Publication:
-
Superconductor Science Technology
- Pub Date:
- April 2010
- DOI:
- 10.1088/0953-2048/23/4/045015
- arXiv:
- arXiv:1002.0808
- Bibcode:
- 2010SuScT..23d5015C
- Keywords:
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- Condensed Matter - Superconductivity;
- Condensed Matter - Materials Science
- E-Print:
- 13 pages, 7 figures