Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma
Abstract
We proposed an altered configuration for dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two rf sources. With Particle-in-cell/Monte Carlo method, we have demonstrated this configuration can remove the harmful electromagnetic and DF coupling effects in conventional DF-CCP.
- Publication:
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arXiv e-prints
- Pub Date:
- December 2009
- DOI:
- 10.48550/arXiv.0912.5129
- arXiv:
- arXiv:0912.5129
- Bibcode:
- 2009arXiv0912.5129W
- Keywords:
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- Physics - Plasma Physics;
- Physics - Computational Physics
- E-Print:
- submitted to Applied Physics Letters