Granular Co-C nano-Hall sensors by focused-beam-induced deposition
Abstract
We investigated the performance of Hall sensors with different Co-C ratios, deposited directly in nanostructured form, using Co2(CO)8 gas molecules, by focused-electron or ion-beam-induced deposition. Due to the enhanced intergrain scattering in these granular wires, the extraordinary Hall effect can be increased by two orders of magnitude with respect to pure Co, up to a magnetic field sensitivity of 1 Ω T - 1. We show that the best magnetic field resolution at room temperature is obtained for Co ratios between 60% and 70% and is better than 1 µT Hz - 1/2. For an active area of the sensor of 200 × 200 nm2, the room temperature magnetic flux resolution is phimin = 2 × 10 - 5phi0 in the thermal noise frequency range, i.e. above 100 kHz.
- Publication:
-
Nanotechnology
- Pub Date:
- March 2010
- DOI:
- 10.1088/0957-4484/21/11/115503
- arXiv:
- arXiv:0908.3028
- Bibcode:
- 2010Nanot..21k5503G
- Keywords:
-
- Condensed Matter - Materials Science;
- Condensed Matter - Mesoscale and Nanoscale Physics;
- Condensed Matter - Other Condensed Matter;
- Physics - Instrumentation and Detectors
- E-Print:
- 5 pages, 4 figures