A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications
Abstract
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$\mu$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.
- Publication:
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arXiv e-prints
- Pub Date:
- May 2008
- DOI:
- 10.48550/arXiv.0805.0934
- arXiv:
- arXiv:0805.0934
- Bibcode:
- 2008arXiv0805.0934R
- Keywords:
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- Computer Science - Other
- E-Print:
- Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)