Reduced-order modelling of the bending of an array of torsional micromirrors
Abstract
An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.
- Publication:
-
Analog Integrated Circuits and Signal Processing
- Pub Date:
- December 2007
- DOI:
- 10.1007/s10470-006-9016-6
- arXiv:
- arXiv:0711.3330
- Bibcode:
- 2007AICSP..53..137M
- Keywords:
-
- Micromirrors;
- MEMS modelling;
- FEM simulation;
- Computer Science - Other
- E-Print:
- Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)