High quality factor gigahertz frequencies in nanomechanical diamond resonators
Abstract
We report actuation and detection of gigahertz-range resonance frequencies in nanocrystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441GHz. The cantilever-array design of the resonators translates the gigahertz-range resonant motion of micron-long cantilever elements to the displacement of the central supporting structure. Use of nanocrystalline diamond further increases the frequency compared to single crystal silicon by a factor of 3. High clamping losses usually associated with micron-sized straight beams are suppressed in the periodic geometry of our resonators, allowing for high quality factors exceeding 20 000 above 500MHz.
- Publication:
-
Applied Physics Letters
- Pub Date:
- November 2007
- DOI:
- 10.1063/1.2804573
- arXiv:
- arXiv:0710.2613
- Bibcode:
- 2007ApPhL..91t3503G
- Keywords:
-
- 85.85.+j;
- Micro- and nano-electromechanical systems and devices;
- Condensed Matter - Mesoscale and Nanoscale Physics;
- Condensed Matter - Materials Science
- E-Print:
- 5 pages, two figures, one table, two-column format. Related papers can be found at http://nano.bu.edu/